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SUGAI WET STATIONB 9 |
D-6-7 WET STATION SUGAI DIFFUSION,SC1/HF SC1/HF 1 1991 ○ B 湿法清洗机
D-6-8 WET STATION SUGAI DIFFUSION,SC1/HF SC1/HF 1 1991 ○ B 湿法清洗机
D-8-1 WET STATION SUGAI NITRIDE REMOVAL H3PO4 1 1991 ○ B 湿法清洗机
D-8-2 WET STATION SUGAI NITRIDE STRP H3PO4 1 1991 ○ B 湿法清洗机
D-6-4 WET STATION SUGAI PRE-DIFFUSION SC1/HF 1 1991 ○ B 湿法清洗机
D-6-5 WET STATION SUGAI PRE-DIFFUSION SC1/HF 1 1991 ○ B 湿法清洗机
D-6-6 WET STATION SUGAI PRE-DIFFUSION SC1/HF 1 1991 ○ B 湿法清洗机
D-6-10 WET STATION SUGAI PRE-DIFFUSION,HF SC1/HF 1 1991 ○ B 湿法清洗机
D-6-2 WET STATION SUGAI PRE-DIFFUSION,HF SC1/HF 1 1991 ○ B 湿法清洗机